MEMS Aerospace Applications Executive Summary:Micro-Electro-Mechanical-Systems (MEMS) are miniature devices, which integrate actuators, sensors, and a processor (controller) to form intelligent systems. They are characterized by their close relationship to integrated-circuit components both in terms of manufacturing techniques and their potential for integrations with electronics. After its emergence in the late eighties, MEMS has developed into billion $ commercial markets, in particular in the automotive, medical, and telecommunication fields. The Lecture Series will address applications in the aerospace field, which encounter unique challenges related to harsh environment conditions and reliability requirements. After an introduction into MEMS technology, six aerospace applications are described, where MEMS will enable the development of potentially new capabilities. They will allow introduction of low-cost, high-end functionality and thereby will enhance performance and extend lifetimes. For these applications, the status, R&D needs, barriers of implementation, and insertion strategies will be discussed. Aerospace applications include (1) active control of thin boundary layer flows with the potential to eliminate conventional flight control surfaces, reduce drag, provide lift-on-demand, and enhance aerodynamic performance of compressors, turbines and low-observable intakes, (2) complete inertial and navigation units on a single chip which offer major advantages in terms of size, weight and cost over conventional systems, (3) fuzing/safety & arming systems for torpedo applications, (4) micro power generation using micro fuel cells and micro engines for potential standalone sensors and actuators with wireless communication, and micro rockets, (5) applications in harsh environments (e.g., high temperatures, large number of vibrational cycles, erosive flows, and corrosive media), and (6) applications for autonomous inventory & storage environments monitoring and for service life predictions. Following on from these MEMS applications, Micro-Optic-Electro-Mechanical-Systems (MOEMS) are described in the context of optical communication & sensing systems file:///C:/Users/pingsi/Downloads/sensors-19-02908.pdf
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